Equipment / Methods
- Thin-film deposition (Thermal Evaporation, E-Beam, Sputtering)
- Glovebox integrated vacuum deposition system
- Inert gas glovebox line with Unidirectional flow and integrated equipment
- Dispensers
- Surface cleaning equipment
- Glovebox integrated wet coating via spin coating
- Lamination tools
- Characterization testing equipment
Process Development Application lab includes:
- Customized development in thin-film technology (PVD)
- In-house process development as service